Denton’s PIB-CVD process used in the Phoenix PIB-CVD system is tunable, allowing the ion energies and gas ratio to be adjusted to suit the needs of a wide range of applications, not only for flowable, soft, thin film encapsulation layers but also for hard, highly hydrophobic, and optically clear coatings.
An automated, inline palletized conveyor system creates uniformly thick and highly homogeneous coatings, ideally suited for both challenging layer stacks and simple product mixes. The Phoenix PIB-CVD inline palletized conveyance (IPC) system provides users optimal uniform coating thicknesses and highly homogeneous coatings.