The Infinity IBD System delivers dense, lower defects films with extremely high precision and uniformity. It offers independent control over ion energies, so you can achieve exacting thin film specs with very low contamination from flaking.
The Bias Target Sputter module offers excellent control of thin film interfaces, provides independent control over ion currents and energies, and operates at a low pressure. This eliminates contamination and scatter from beam overspill, prevents surface damage, enables tight stress control, and creates dense, defect-free films.
The BTS module improves cost of ownership with increased target usage that allows you to reduce the overall target size. The system design makes it possible to achieve excellent uniformity on large substrates without rotation. The module offers pulsed sputtering and a higher deposition rate compared to other IBD platforms.
All of these unique features and benefits are backed by Denton’s commitment to long-term partnership and service. With our experts, you will receive a highly reliable configuration to meet your needs and specifications that delivers high system uptime and ease of maintenance.