The Infinity FA System is a cost-effective solution for etching and profiling devices with high throughput, providing rapid results at a low cost of ownership. It delivers excellent delayering uniformity and minimal damage over large areas. The fully integrated SIMS package provides the precision required to locate small defects for further analysis. By using multiple etch technologies, the etch rates of different components of a single layer can be matched, enabling uniform removal of the entire layer regardless of chemical composition.
Backed by Denton’s commitment to partnership, the Infinity FA tool delivers quality performance and high system uptime. Our global service team will provide you with a trusted preventive maintenance schedule and responsive support to ensure the best productivity and production results.