Thin Film Deposition Products

Our thin film deposition technology delivers consistent, repeatable results through wide-process capability, ease-of-use, superior reliability, and global service and support. Choose from a range of thin film deposition solutions to accommodate any material and application, including evaporation, thermal evaporation, magnetron sputtering, PE-CVD and ion beam, as well as solutions for sample preparation and in situ control.

Our years of innovation in thin film technology have resulted in solutions that deliver high yield, proven reliability in real-world production environments and a low total cost of ownership, giving you a solid return on investment. As a leading source for thin-film technology, Denton also provides value-added services and lifetime support that set new industry standards.

Common applications for our thin film deposition solutions include precision optics, lift-off & step coverage, dual-sided laser facet coating, indium for wafer-level packaging, diamond-like carbon, metallization and medical coatings. Select from the technologies below to see the solutions that are right for you.

The Apps Lab at Denton Vacuum

Denton Vacuum enables innovation. From basic research to manufacturing hand-off, our thin film deposition technologies provide superior performance in applications. Our Applications Laboratory is key to our innovation. Our lab is equipped with state-of-the-art tools to produce cutting-edge sputtered and evaporated thin films and to evaluate performance. Working closely with our development team, our applications team also helps bring new products and subsystems to a mature, production-worthy level before we release them.

We employ our expertise in thin films to help our customers address challenges, reduce risk and develop optimized processes that can be simulated in a real-world environment during their development phase. Contact us today to find out how you can leverage our Apps Lab to test your own process development. Please see our Sources & Controls.

Application-Specific Products

Integrity

Thin film solutions with high yield, stress control, high deposition rate, PID control, optimal grain size and film crystallography for opto-electronic devices.

Discovery

Magnetron sputtering solutions, excellent for ultra thin films and coating 3D surfaces used in sensors and power devices.

Voyager

Wafer based Plasma Ion Beam CVD systems designed to provide cutting edge solutions for display and opto-electronics.

Infinity

Ion beam sputtering and ion beam etch solutions offer the precise energy control required to produce the best quality films required advanced semiconductor chip manufacturing.

Versa

High volume wafer-based systems configured with any Denton deposition and etch technology tailored to customer process and production needs.

Phoenix

High volume large area systems configured for in-line production to support high throughout for display, lighting and renewable energy applications. Supports all Denton process technologies for both flexible and rigid substrate processing of material up to 2 meters wide.

Research

Denton offers a variety of thin film coating solutions for Research, R&D and Quality Assurance (QA) applications.