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Denton’s Phoenix system platform is designed for high-volume in-line production. The system comes in two primary configurations: the Phoenix LC for magnetron sputtering with a rectangular or rotary linear cathode, and the Phoenix PIB-CVD for room-temperature chemical vapor deposition. Both systems can be configured with multiple sources to support a variety of applications.
In this video we discuss both the Phoenix LC and Phoenix PIB-CVD.
Video Transcript
The Phoenix is a large area coating platform configured for inline production to support high throughput for large-volume production. The Phoenix LC is based on a rectangular planar cathode or rotary cathode, and supports both planar and 3D component processing.
The Phoenix LC system can be configured with a rectangular planar cathode mounted directly above the substrate. This provides tight uniformity on one side of the substrate for properties including film thickness, sheet resistance, and refractive index. This setup offers improved yield and a high deposition rate. For 3D substrates, this provides good high-angle deposition and good conformal coating. While rectangular cathodes are most often used, rotary cathodes are available for best target utilization and lifetime.
The Phoenix PIB-CVD uses plasma ion beam chemical vapor deposition to enable thin film deposition at room temperature. The Phoenix PIB-CVD is based on Denton’s patented linear ion source.
This deposition method can be tuned to produce coating compositions ranging from polymer-like to DLC-like, or diamond-like, coatings from a single precursor. In this system, the ion energies and oxygen ratio can be adjusted to suit the needs of a wide range of applications, ranging from flowable soft, thin film encapsulation layers to hard, highly hydrophobic and optically clear coatings.
It is compatible with any available CVD precursor.
Conclusion
To learn more, download our technical paper Tunability of PIB-CVD Organosilicon Thin Films where we discuss how PIB-CVD enables chemical reactions at low temperatures.