See how Denton Vacuum has pioneered thin film for 6 decades.
Periodically, Denton Vacuum makes available deposition systems prepared and readied for fast delivery. These proven, capable and versatile tools, used for production and development, provide a unique opportunity to purchase Denton Vacuum tools at substantial savings and with an accelerated delivery timeframe.
Denton Vacuum now has five such systems on its quick delivery list: a Phoenix 400 for production in-line sputtering, an Explorer 14 E-beam evaporation system, and an Integrity 44 for manufacturing precision optics. In addition, Denton is assisting our customers in the sale of two systems – a Phoenix 400X for production in-line sputtering and a Voyager system equipped for plasma enhanced chemical vapor deposition.
Denton Systems
This is a new, high-performance, high-output, turnkey multi-cathode magnetron sputtering system that supports planar and 3D component processing on areas up to 14” x 14” (356 mm x 356 mm) and up to four metals using DC, DC pulse or magnetron sputtering cathodes. Complete with a dual-level load lock, the Phoenix 400 provides capable and versatile handling of high-throughput production, even as you increase your production capabilities or add deposition technologies to your ever-changing requirements.
This is a new, e-beam evaporation system configured for high uniformity deposition of wafers and/or optical components. With a 30″ (750 mm) high process chamber, a Brooks CTI-8 cryopump, and an Inficon deposition controller, this system is ideal for research, development and low-volume production. This Explorer E-beam evaporation system can be equipped with a bulk water-cooled stage for lift-off applications, or a dome fixture for deposition on multiple substrates or wafers.
[h3] Denton Integrity 44
This remanufactured high-volume batch production evaporation system delivers demanding precision optical and metal coatings in an automated, clean-room compatible system, coating substrates up to one meter in diameter. The Integrity 44 can be equipped for production-scale wafer or precision optics, and comes with fully automated process controls. The Integrity 44 delivers uptime, product yield and throughput for your most demanding production requirements.
Customer Owned Systems
This is a new, high-performance, high-output, turnkey multi-cathode magnetron sputtering system that supports planar and 3D component processing on areas up to 20” x 20” (508 mm x 508 mm) and up to four metals using DC, DC pulse or magnetron sputtering cathodes. Complete with a dual-level load lock, the Phoenix 400X provides capable and versatile handling of high-throughput production, even as you increase your production capabilities or add deposition technologies to your ever-changing requirements. The system is being offered for sale by the owner, who has asked Denton to support its re-sale with any required modifications to meet the new owner’s requirements.
This is a pre-owned Denton Voyager plasma-enhanced chemical vapor deposition system now located at a customer site in North America. This Voyager is equipped with a multi-gas delivery system, a high capacity turbo molecular pump, and an ion source for surface treatment and deposition. Configured for 2D or 3D component deposition, this Voyager is available for immediate purchase.
For more information about these products, or any other products and services, feel free to contact Ernie Burrell, Regional Sales Manager, at eburrell@dentonvacuum.com or 856-380-5222.
Now in its 50th year, Denton Vacuum continues to transform barriers into thin-film technology breakthroughs for customers across the globe. With operations in the United States and China, Denton designs and develops systems that precision-coat aerospace components, advanced optics, medical implants, solar cells, semiconductor devices and much more. Fifty years of tireless innovation have produced robust offerings ranging from high-volume production platforms to unique custom-engineered systems. Denton’s technology portfolio includes atomic layer deposition (ALD), thermal evaporation, e-beam evaporation, ion-beam-assisted evaporation, magnetron sputtering (including reactive sputtering), plasma-enhanced-chemical-vapor deposition (PECVD), ion etch and ion-beam-assisted deposition (IBAD). As a leading source for thin-film technology, Denton also provides value-added services and lifetime support that set new industry standards. See how barriers become breakthroughs by visiting Dentonvacuum.com.