Integrity
The Integrity is configured for demanding optical coating, semiconductor and compound semiconductor applications. A temperature management system supports a fluid-cooled substrate stage for small grains and textured films.
View DetailsThin film optical filters, also called thin film filters or TFFs, filter or modify lightwaves within an optical system to meet the phase control needs of different optical applications. Example applications include photolithography, image enhancement, image splitting, color match imaging and Raman spectroscopy. Thin film optical filters are used across many industries, including aerospace & defense, medical, and electronics.
Common thin film deposition methods for optical filters or TFFs are ion assisted e-beam evaporation, magnetron sputtering, and ion beam sputtering. We offer solutions for each type of deposition: choose the Integrity for ion assisted e-beam evaporation, choose the Discovery for magnetron sputtering, and the Infinity IBD for ion beam sputtering.
The Integrity is configured for demanding optical coating, semiconductor and compound semiconductor applications. A temperature management system supports a fluid-cooled substrate stage for small grains and textured films.
View DetailsThe Discovery Magnetron Sputtering system offers versatility and high-volume production capability. The system can accommodate up to 4 cathodes with triaxis adjustment.
View DetailsWhen you need a high-quality film for demanding applications such as optical interference coatings or x-ray mirror optics, the Infinity Ion Beam Deposition System is the solution for you.
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