Voyager
The Voyager is a plasma-enhanced chemical vapor deposition (PE-CVD) system that excels by providing best-in-class flexibility, process control, and sputtering options.
View DetailsAn organic light-emitting diode (OLED) is a light-emitting diode (LED) in which the emissive electroluminescent layer is a film of organic compound that emits light in response to an electric current OLEDs are used to create digital displays in devices such as television screens, computer monitors, and portable systems such as smartphones and handheld game consoles. Rigid OLED displays are encased in a glass sheet because glass is a durable barrier and is easy to handle. For the next generation of flexible OLED displays, the glass sheet is replaced with a transparent Thin Film Encapsulation layer.
Denton’s unique, patented Plasma Ion Beam CVD technology can deposit both inorganic and organic layers in a single system whereas two separate systems are used in limited production today. The Phoenix PIB-CVD linear ion source can control both ion energy and ion current density, the key to being able to deposit organic and in-organic layers in a single system. This source can be scaled to 2 meters in length, making it suitable for depositing on large area sheets of plastic or very thin glass. The source is also easy to maintain, making the Phoenix PIB-CVD a perfect solution for high volume production needed to commercialize flexible OLED displays.
The Voyager is a plasma-enhanced chemical vapor deposition (PE-CVD) system that excels by providing best-in-class flexibility, process control, and sputtering options.
View DetailsThe Discovery Magnetron Sputtering system offers versatility and high-volume production capability. The system can accommodate up to 4 cathodes with triaxis adjustment.
DiscoveryThe Phoenix Magnetron Sputtering system offers high throughput for large volume production, and supports both planar and 3D component processing. This system can accommodate PIB-CVD as well as RF, DC and pulsed DC sputtering processes.
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