See how Denton Vacuum has pioneered thin film for 6 decades.
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Denton’s Phoenix system platform is designed for high-volume in-line production. The system comes in two primary configurations: the Phoenix LC for magnetron sputtering with a rectangular or rotary linear cathode, and the Phoenix PIB-CVD for room-temperature chemical vapor deposition. Both systems can be configured with multiple sources to support a variety of applications. In this… Read More
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Magnetron sputtering is a versatile deposition technique that creates very dense films with good adhesion. It can easily deposit materials with high melting points that cannot be evaporated. Denton Vacuum’s magnetron sputtering systems are highly configurable with multiple cathode options to meet the specific requirements of different applications. In this article, we discuss the multiple… Read More
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Welcome to the Denton Vacuum Applications Laboratory Denton Vacuum has hit a milestone with the Customer Application Development Center, the Apps Lab, as we pass the 10-year mark. The CADC empowers innovation by producing state-of-the-art sputtered, etch, and evaporated thin films and evaluating machine performances with our cutting-edge tools. In the CADC, Denton has three… Read More
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At the end of every fiscal year, many companies take advantage of surplus capital before their budget is set for the upcoming year. In an ever-changing business landscape, it’s crucial to maximize your capex budget in as many areas as possible. To do this while increasing your factory output, choose the thin film deposition process… Read More
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Enable uniform removal of the entire layer regardless of chemical composition The Infinity FA from Denton Vacuum is optimized for delayering applications. The Infinity FA can utilize multiple etch technologies for uniform removal of layers. This high-performance etch tool is designed for delayering finished or in-process integrated circuits for failure analysis or reverse engineering. Learn… Read More
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The Versa cluster platform is an automated front-end option for high-volume manufacturing for thin film deposition operation with Denton’s ProcessPro-HV software. Versa is designed to work with 200 mm or 300 mm process modules and is compatible with Discovery sputter modules and the Voyager PE-CVD system. This cluster platform has features dedicated to sputter etch… Read More
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Semiconductor manufacturing often takes a hardware-centric perspective when selecting equipment and vendors. However, manufacturers can benefit from a vendor’s industry experience and, instead, take an application-specific route. A partner like Denton Vacuum, with decades of experience, can address key concerns to get you to production faster than piecing together OEM parts. Working with a single vendor, or… Read More
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Upgrades deliver a number of benefits without the need to invest in brand new equipment. They provide a cost-effective way to lower your cost of ownership, improve process capabilities and reduce maintenance and downtime. The ability to upgrade your thin film deposition configuration depends largely on your specific system, your application and process needs and… Read More
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In any thin film deposition process, software is required to run the system and record data from each run. Software also helps process engineers monitor feedback from in-situ controls and make other adjustments inside the system during deposition. But not all deposition equipment software is scalable for high-volume production. More basic software is perfectly suitable… Read More
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This November, many companies will take advantage of surplus capital before their budget is set for the upcoming year. In a recent survey of nearly 150 compound semiconductor manufacturers on their capital expense budgets, around 42% of companies predict their capex budget will increase in 2019, while 31% predict a decrease. In an ever-changing business… Read More