CVD

A deposition process that uses a chemical reaction to create high-quality thin films

A close up of the Denton Vacuum Phoenix system

Phoenix: Large Area Coating System for In-Line Production

Posted on December 6, 2024December 9, 2024

Denton’s Phoenix system platform is designed for high-volume in-line production. The system comes in two primary configurations: the Phoenix LC for magnetron sputtering with a rectangular or rotary linear cathode, and the Phoenix PIB-CVD for room-temperature chemical vapor deposition. Both systems can be configured with multiple sources to support a variety of applications. In this… Read More

Liner RF Ion Source: Technology and Typical Geometry

Why PIB-CVD? Process Tunability

Posted on December 6, 2022December 3, 2024

The Process Tunability of PIB-CVD Makes it Optimal for Many Thin film Applications. The inherent tunability of PIB-CVD enables a wide range of film properties including flowable, soft, thin film encapsulation layers as well as hard, highly hydrophobic, and optically clear coatings. As a result, multilayer and gradient coatings can be produced in a single chamber from… Read More

CVD

Phoenix: Large Area Coating System for In-Line Production

Why PIB-CVD? Process Tunability

Recent Posts

Categories