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Thin films obtained by standard chemical vapor deposition (CVD) typically require temperatures ranging from 600°C to 800°C. Using plasma enhanced CVD (PE-CVD) allows reactions to occur at temperatures down to 350°C. Plasma ion beam CVD (PIB-CVD) advances this process even further by allowing room temperature deposition. Without the need to heat a substrate to such a high degree, PIB-CVD enables new applications for thin film deposition.
In this video we compare PE-CVD and PIB-CVD to highlight 5 benefits of this highly tunable technology.
Video Transcript
In chemical vapor deposition, a substrate must be heated to an extremely high temperature of 600°C to 800°C for reactions to occur. Plasma Enhanced CVD allows deposition to occur at lower temperatures of 200°C to 400°C. Denton’s revolutionary Plasma Ion Beam CVD, or PIB-CVD, enables deposition at temperatures as low as 20°C.
Here are Five Benefits of Denton’s PIB-CVD over PECVD.
One: Room-Temperature Deposition
PIB-CVD is a low-temperature process that can be performed at room temperature, with no need for heat. This prevents thermal damage to the substrate, enabling the ability to deposit on plastic substrates.
Two: High Tunability
In PIB-CVD, the ion current density and the ion energy can be independently controlled without the need for substrate biasing. This high tunability enables deposition of completely different films by simply changing ion source parameters.
Three: Curved and Uneven Surfaces
PIB-CVD performs large area coatings on both flat and curved substrates. It has excellent conformality and s tep coverage on uneven surfaces.
Four: Adhesion to Plastic Surfaces
PIB-CVD can be used to coat plastic surfaces that require properties like high optical transmission, enhanced durability, high hardness, and low friction – without the need of a wet chemical hard coat as the adhesion layer. All the properties that can be put on a glass substrate can therefore be put on a plastic surface.
And finally, Five: Roll-to-Roll and Flexible Coatings
PIB-CVD allows for high-volume and continuous production of coating on a flexible substrate, so it can be used in roll-to-roll coating in applications such as flexible displays and solar cells.
To learn more about PIB-CVD, visit DentonVacuum.com.
If you are interested in learning more about Denton’s PIB-CVD systems, contact us today!